維護保養
● 提供年度設備之保養點檢及契約服務
Annual equipment inspection and maintenance contracts provided.
● 提供各類設備問題之緊急故障排除
Emergency troubleshooting for all kinds of equipment issues provided.
● 提供製程、生產、維修、教育訓練等技術諮詢
Technical consultation available for processes, production, maintenance, education
and training.
● 各式設備附屬零配件及模組儀器整修及保養
Servicing and overhauling for all kinds of equipment parts, modules and instruments,
including.
| ● Oil Rotary Pump Overhaul (DRP-1400, DRP-360) |
| ● Turbo Molecular Pump Overhaul |
| ● Power Supply Repair (UV, MS, US, O₃) |
| ● Process Chamber Recoating / Cleaning |
| ● Ceramics Tube Cleaning |
| ● Teflon Parts Recoating |
| ● HJ Pump Overhaul |
| ● Robot Overhaul |
| ● BD Mastering Equipment Laser Pick Up Heat Overhaul |
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